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Electrical Properties of SBT Capacitors with various Annealing Atmosphere

다양한 열처리 분위기에 따른 SBT 커패시터의 전기적 특성

  • 조춘남 (광운대학교 전기공학과) ;
  • 김진사 (광운대학교 전기공학과) ;
  • 신철기 (광운대학교 전기공학과) ;
  • 최운식 (대불대학교 전기공학과) ;
  • 김충혁 (광운대학교 전기공학과) ;
  • 홍진웅 (광운대학교 전기공학과) ;
  • 이준웅 (한국전기전자재료학회)
  • Published : 2003.03.01

Abstract

The Sr$\_$0.7/Bi$\_$2.6/Ta$_2$O$\_$9/(SBT) thin films are deposited on Pt-coated electrode(Pt/TiO$_2$/SiO$_2$/Si) using RF magnetron sputtering method. The structural and electrical properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealed atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grain largely grew in oxygen annealing atmosphere. The maximum remnant polarization and the coercive electric field in oxygen annealing atmosphere are 12.40[${\mu}$C/cm$^2$] and 30[kV/cm] respectively. The dielectric constant and leakage current density of capacitors annealed oxygen atmosphere are 340 and 2.13${\times}$10$\^$-9/ [A/cm$^2$] respectively. The fatigue characteristics of SBT capacitors did not change up to 10$\^$10/ switching cycles.

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