Fabrication and Analysis of Characteristics of PRT using High-fine Laser Trimming Technology

고정밀 레이저 가공 기술을 이용한 PRT 제작 및 특성 분석

  • 노상수 (대양전기(주) 부설기술연구소) ;
  • 서정환 (대양전기(주) 부설기술연구소) ;
  • 정귀상 (동서대학교 전자기계공학부) ;
  • 김광호 (부산대학교 무기재료공학부)
  • Published : 2003.01.01


In this paper, we fabricated PRT(platinum resistance thermometers) with the trimming technology using high fine laser system. U. V.(wavelength: 355nm) laser was mainly used for adjusting Pt thin films resistors to 100Ω at 0$^{\circ}C$. Internationally, the accepted A-class tolerance of temperature sensor is ${\pm}$0.06Ω at 0$^{\circ}C$. according to DIN EN 60751. The width of trimmed lines was about 10$\mu\textrm{m}$ and the best trimming conditions of Pt thin films were power : 37mW, frequency : 200Hz and bite size:1.5$\mu\textrm{m}$. And 96 resistors, fabricated by photolithography and etching process, have 79∼90Ω and 91∼102Ω as the proportion of 45.7% and 57.3%, respectively. As result of sitting Pt thin films resistors to the target value(109.73Ω at 25$^{\circ}C$), 82.3% of all resistors had the tolerance within ${\pm}$0.03Ω and the others(17.7%) were within ${\pm}$0.06Ω of A-class tolerance. The PRTs which wore fabricated in this research had excellent characteristics as follows; high accuracy, international standard TCR(temperature coefficient of resistance) value, long-term stability, wide temperature range, good linearity and repeatability, rapid response time, etc.


  1. Appl. Phys. Lett. v.74 no.14 Laser technologies for manufacturing of advanced materials and devices J. J. Dubowski
  2. Laser Beam Shaping, Proceedings of SPIE v.4095 Laser micromachining in microelectronics industry Edward J. Swenson;Yunlong Sun;Corey Dunsky
  3. IEEL J. of Solid-State Circuits v.SC-16 no.5 Laser programmable redundancy and yield improvement in 64K DRAM Robert T. Smith;James D. Chlipala
  4. COMSATS v.2 no.4 Thick film technology and its application in telecommunication system M. Aslam;J. A. Mirza
  5. J. Appl. Phys. v.36 Microstructure and temperature coefficient of resistance of platinum films Jialiang Zhang;Yoshimichi Nagao
  6. First Int. Symp. on Laser PM, Proc. SPIE v.4088 Laser-induced microstructuring of photonic material semiconductors Jan J. Dubowski
  7. Electrochemical Society Proceeding v.29-99 Reliability characterization of $RuO_2$ thin film resistors L. F. Garfias;D. J. Siconolfi
  8. Laser Applications in Microelectronic and Optoelectronic Manufacturing Ⅳ, Proc. of SPIE v.4274 A novel laser trimming technique for microelectronics M. Meunier