Analytical Science and Technology (분석과학)
- Volume 15 Issue 1
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- Pages.87-90
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- 2002
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- 1225-0163(pISSN)
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- 2288-8985(eISSN)
Analysis of Trace Trichlorosilane in High Purity Silicon Tetrachloride by Near-IR Spectroscopy
근적외선 분광법을 이용한 고순도 SiCI4 중의 미량 불순물 SiHCI3의 분석
- Park, Chan-Jo (Chemical Analysis Laboratory, Korea Research Institute of Chemical Technology) ;
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Lee, Sueg-Geun
(Chemical Analysis Laboratory, Korea Research Institute of Chemical Technology)
- Received : 2001.10.15
- Published : 2002.02.25
Abstract
The content of
Keywords
near IR;optical fiber;silicon tetrachloride;trichlorosilane
File
References
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