Effect of Mixed Gases on Decomposition Characteristic of CF4 by Non-Thermal Plasma

비열플라즈마를 이용한 CF4 분해에 미치는 혼합가스의 영향

  • 박재윤 (경남대학교 전기·전자공학부) ;
  • 정장근 (경남대학교 전기·전자공학부) ;
  • 김종석 (경남대학교 전기·전자공학부) ;
  • 임근희 (한국전기연구원)
  • Published : 2002.06.01


In this paper, the $CF_4$ decomposition rate and by-product were investigated for two simulated plasma reactors which are metal particle reactor and spiral wire reactors as a function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25% over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80% at AC 24kV. The $CF_4$ decomposition rate used Ar-$N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $N_2Ar$ base as were similar, but in case of air base they were different.


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