Fabrication and Experiment of Micro Particle Manipulator

미세 입자 조작 기구의 제작 및 실험

  • Published : 2001.03.01


A micro particle manipulator, which is devised for trapping particles at fixed positions by negative dielectrophoretic force (DEP force), has been fabricated and experimented. It is composed of square type electrode arrays fabricated by nickel electroplating with the height of 28 ${\mu}m$. To improve the quality of electroplated nickel electrodes, plating conditions have been optimized. Micro particles used in this study are polystyrene spheres and their to the specific position and trapped. The DEP force along the moving path of the particles has been estimated by the motion equation of a single particle. The displacement of a particle with an elapsed time was measured using a high-speed camera (1000 frames/sec). The velocity and acceleration of the particle were calculated from the measured data. The DEP force acting on the particle was estimated.


micro paticle manipulator;dielectrophoretic force(DEP force);nickel electroplating;polystyrene spheres


  1. J. H. Choi, Estimation Method of the DEP Force Exerted on a Cell in a Planar Electrode Structure, Master thesis, Seoul National University, Seoul, Korea, 1996
  2. R. B. Bird, R. C. Armstrong, and O. Hassager, Dynamics of polymeric liquids, John Wiley & Sons, 1977
  3. T. B. Jones, Electromechanics of particles, Cambridge University Press, New York, 1995
  4. A. B. Frazier and M. G. Allen, High Aspect Ratio Electroplated Microstructures Using A Photosensitive Polyimide Process, Proc. IEEE Micro Electro Mecianical Systems, pp. 87-92, 1992 https://doi.org/10.1109/MEMSYS.1992.187696
  5. A. B. Frazier and M. G. Allen, Metallic Microstructures Fabricated Using Photosensitive Polyimide Electroplating Molds, Journal of Microelectromechanical Systems, vol. 2, no. 2, pp. 87-94, 1993 https://doi.org/10.1109/84.232605
  6. F. A. Lowenheim, Modern Electroplating, John Wiley & Sons, 1974
  7. G. Fuhr, W. M. Arnold, R. Hagedorn, T. Muller, W. Benecke, B. Wagner, and U. Zimmermann, Levitation holding, and rotation of cells within traps made by high-frequency fields, Biochimica et Biophysica Acta Vol. 118, pp. 215-223, 1992 https://doi.org/10.1016/0005-2736(92)90028-K
  8. T. Schnelle, R. Hagedorn, G. Fuhr, S. Fiedler, and T. Muller, Three-dimensional electric field traps for manipulation of cells-calculation and experimental verification, Biochimica et Biopbysica Acta, Vol. 1157, pp. 127-140, 1993 https://doi.org/10.1016/0304-4165(93)90056-E
  9. H. A. Pohl, Dielectrophoresis, Cambridge University Press, London, 1978
  10. I. Turcu and C. M. Lucaciu, Dielectrophoresis : A Spherical Shell Model, J Phys. A: Math Gen, Vol. 22, pp. 985-993, 1989 https://doi.org/10.1088/0305-4470/22/8/014
  11. A. Desai, S. W. Lee, and Y. C. Tai, A MEMS electrostatic particle transportation system, Proc. IEEE Micro Electro Mechanical Systems, pp,121-126, 1998 https://doi.org/10.1109/MEMSYS.1998.659740
  12. N. G. Green, and H. Morgan, Dielectrophoretic separation of nano-particles, J. Phys. D: Appl. Pltys., Vol. 30, pp. L41-L44, 1997 https://doi.org/10.1088/0022-3727/30/11/001
  13. M. Washizu, Manipulation of biological objects in micromachined structures, Proc. IEEE Micro Electro Medanical Systems, pp. 196-201, 1992 https://doi.org/10.1109/MEMSYS.1992.187717
  14. X-B. Wang, Y. Huang, J. P. H. Brut, G. H. Markx, and R. Pethig, Selective dielectrophoretic confinement of bioparticles in potential energy wells, J. Phys. D:AppL Phys., Vol. 26, pp. 1278-1285, 1993 https://doi.org/10.1088/0022-3727/26/8/019
  15. H. Aoyama, S. Hiraiwa, F. Iwata, F. Fukaya, and A. Sasaki, Miniature robot with micro capillary capturing probe, Proc. 6th Int. Symp. on Micro Machine and Human Science, pp. 173-178, 1995 https://doi.org/10.1109/MHS.1995.494235
  16. C. - J. Kim and A. P. Pisano, Silicon-processed overhanging microgripper, J. Microelectromech Syst., Vol. 1, No. 1, pp. 31-36, 1992 https://doi.org/10.1109/84.128053
  17. H. Morgan, N. G. Green, M. P. Hughes, W. Monaghan, and T. C. Tan, Large-area travelling-wave dielectrophoresis particle separator, J. Micromech Microeng., Vol. 7, pp. 65-70, 1997 https://doi.org/10.1088/0960-1317/7/2/004