A Polysilicon Capacitive Microaccelerometer with Unevenly Distributed Comb Electrodes

비등간격 수평감지 전극구조의 정전용량형 다결정 실리콘 가속도계

  • 한기호 (한국과학기술원 기계공학과) ;
  • 조영호 (한국과학기술원 기계공학과)
  • Published : 2001.07.01


We present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.


Microaccelerometer;Unevenly Distributed Electrode;Capacitive Detection;Perforated Proof-Mass


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