Thick-Film Strain-gage Ceramic-Pressure Sensor

세라믹 다이어프램을 이용한 후막 스트레인 게이지 압력센서

  • 이성재 (대림대학 자동화시스템공학과) ;
  • 박하용 (삼척대학교 전기공학과) ;
  • 민남기 (고려대학교 제어계측공학과)
  • Published : 2001.12.01


In this paper, we presents the construction details and output characteristics of a thick film piezoresistive strain gage. The thick film was printed on the ceramic diaphragm back side by screen printing and cured at 850$^{\circ}C$. The strain distribution and deflection on ceramic diaphragm were performed with finite-element method(FEM tool ANSYS-5.3). Various thick film strain gage characteristics were analysed, including nonlinearity, hysteresis, stability and sensitivity of thick film strain gages.


  1. 計測技術 v.1 壓力變換機 大倉 征
  2. Sensors and Actuator A v.62 Optimum design consideration for silicon piezoresistive pressure sensors Y.Kanda;A.Yasukawa
  3. J. Phys. D:Appl. Phys. v.12 Strain sensitivity in film and cermet resistors measured and physical quantities B.Morton;L.Pirozzi;M.Prudenziati
  4. A study of the piezoresistive effect in thick film resistors and its application to load transduction N.M.White
  5. Sensors and Actuators v.A58 Diaphragm deflection of silicon interferometer structures used as pressure sensors Z.Xiao;O.Engstrom;N.Vidovic
  6. Sensors and Actuators v.A68 Practical approach to extraction of piezoresistance coefficient Zenon Gniazdowski;Pawel Kowalski
  7. 전기전자재료학회지 v.10 no.9 Cu-Ni 박막스트레인 게이지를 이용한 다이어프램식 압력센서-Ⅰ: Cu-Ni 박막 스트레인 게이지 개발 민남기;이성래;김정완;조원기
  8. 전기전자재료학회지 v.10 no.9 압전세라믹을 이용한 풍차형 초음파 전동기의 제작과 특성 지승한;이덕출;김진수
  9. 전기전자재료학회지 v.10 no.10 Cu-Ni 박막 스트레인게이지를 이용한 다이어프램식 압력센서-Ⅱ: 압력센서의 설계, 제작 및 특성 민남기;박찬원;전재형
  10. Sensors and Actuators v.A78 The electrical reponse of thick film resistors to hydrostatic pressure and uniaxial stress between 77 and 535K Nigel Fawcett;Martyn Hill
  11. Sensors and Actuators v.A60 High-temperature ceramic pressure sensor I.Ayerdi;E.Catano;A.Garcia-Alonso;I.Gracia