Thick-Film Strain-gage Ceramic-Pressure Sensor

세라믹 다이어프램을 이용한 후막 스트레인 게이지 압력센서

  • 이성재 (대림대학 자동화시스템공학과) ;
  • 박하용 (삼척대학교 전기공학과) ;
  • 민남기 (고려대학교 제어계측공학과)
  • Published : 2001.12.01

Abstract

In this paper, we presents the construction details and output characteristics of a thick film piezoresistive strain gage. The thick film was printed on the ceramic diaphragm back side by screen printing and cured at 850$^{\circ}C$. The strain distribution and deflection on ceramic diaphragm were performed with finite-element method(FEM tool ANSYS-5.3). Various thick film strain gage characteristics were analysed, including nonlinearity, hysteresis, stability and sensitivity of thick film strain gages.

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