A Study on the Growth of Carbon Nanotubes Using ICPCVD and Their Field Emission Properties

유도결합형 플라즈마 화학기상 증착법을 이용한 탄소나노튜브의 성장 및 전계방출 특성 연구

  • 김광식 (한국화학연구원 화학소재연구부) ;
  • 류호진 (한국화학연구원 화학소재연구부) ;
  • 장건익 (충북대학교 공과대학 재료공학과)
  • Published : 2001.10.01


In this study, carbon nanotubes was vertically grown pm Ni/Cr-deposited glass substrates by Inductively Coupled Plasma Chemical Vapor Deposition. Using Radio-Frequence(RF) plasma below temperature of 600$^{\circ}C$. The grown CNTs shows field emission properties and high quality materials. Turn-on fields and current density showed 5V/${\mu}$m and 1.06${\times}$10$\^$-6/ A/$\textrm{cm}^2$, respectively.


  1. Nature v.354 Helical microtubles of graphitic carbon S. Iijima
  2. Nature v.233 Structure of fibrous carbon T. Baird;J. R. Frayer;B. Grant
  3. Science v.282 Synthesis of large arrays of well-aligned carbon nanotubes on glass Z. F. Ren;Z. P. Huang;J. W. Xu;J. H. Wang;P. Bush;M. P. Siegal;P. N. Provencio
  4. SID' 98 Digest Carbon nonotube FED element S. Uemura;T. Nagasako;J. Yotani;T. Shimojo;Y.Saito
  5. 전기전자재료학회논문지 v.13 no.5 탄소나노튜브의 전자구조 김용현;심홍선;김용성;장기주
  6. 전기전자재료학회논문지 v.13 no.5 탄소나노튜브의 전자적물성 김동호
  7. 전기전자재료학회논문지 v.13 no.5 탄소나노튜브를 이용한 전계방출 디스플레이 최원봉;이내성;김종민
  8. Carbon v.39 Carbon materials for the electrochemical storage of energy in capacitors E. Frackowiak;F. Beguin
  9. Synthetic Metals v.113 Hydrogen adsorption and storage in carbon nanotubes S. M. Lee;K. S. Park;Y. C. Choi;Y. S. Park;J. M. Bok;D. J. Bae;K. S. Nahm;Y. G. Choi;S. C. Yu;N-G Kim;T. Frauenheim;Y. H. Lee
  10. Appl. Phys. Lett. v.73 Fiedl emission from single wall carbon nanotube films J. M. Bonard;J. P.Salvetat;T. Stokli;W. A. Heer;L. Forro;A. Chatelain
  11. Diamond relat. Mater. v.9 Field Emission from carbon nanotubes for displays J. M. Kim;W. B. Choi;N. S. Lee;J. E. Jung
  12. Thin Solid Films v.383 Field emission from carbon nanotubes grown by layer-by-layer deposition method using plasma chemical vapor deposition S. J. Chung;S. H. Lim;J. Jang
  13. Surf. Coat. Tech. v.131 Growth characteristics of carbon nanotubes by plasma enhanced hot filament chemical vapor deposition J. H. Han;B-S Moon;W. S. Young;J-B. Yoo;C-Y. Park
  14. J. Phys. Chem. solids Carbon films with high density nanotubes produced using microwave plasma assited CVD Q. Zhang;S. F. Yoon;J. Ahn;B. Gan;Rusli;M.-B.Yu
  15. Appl. Phys. Lett. A: Materials Science and Processing v.70 Solar production of single-wall carbon nanotubes: growth mechanisms studied by electron microscopy and Raman spectroscopy Alvarez, L.;Guillard, T.;Sauvajol, J.L.;Flamant, G.;Laplaze, D.
  16. Synthetic Metals v.103 Raman characterization of single walled carbon nanotubes and PMMA-nanotubes composites M. Lamy De La Chapelle;C. Stephan;T. P. Nguyen;S. Lefrant;C. Journet;P. Bernier;L. Alvarez;D. Laplaze;E. Munoz;A. Benito;W. K. Maser;M. T. Martinez;G. F. De La Fuente;T. Guillard;G. Flamant
  17. Carbon v.38 Purification of single-walled carbon nanotubes synthesized by the catalytic decomposition of hydrocarbons F. Li;H. M. Cheng;Y. T. Xing;P. H. Tan;G. Su
  18. Carbon v.39 High yield purification of multiwalled carbon nanotubes by selective oxidation during thermal annealing Y. S. Park;Y. C. Choi;K. S. Kim;D-C. Chung;D. J. B;K. H. An;S. C. Lim;X. Y. Zhu;Y. H. Lee
  19. Appl. Phys. Lett. v.75 no.6 Large current density from carbon nanotube field emitters W. Zhu;C. Bower;O. Zhou;G. Kochanski;S. Jin
  20. Appl. Phys. Lett v.70 Field emission from nanotube bundle emitters at low field Q. H. Wang;T. D. Corrigan;J. Y. Dai;R. P. H. Chang;A. R.Krauss
  21. Diam. Relat. Mater. v.9 Energy distribution of field emitted electrons from carbon nanotubes R. Schetesser;R. Cllazo;C. Bower;O. Zhou;Z. Sitar