Electrical Characteristic of Ni-Cr-Al-Cu Alloy Thin Film Resistors

Ni-Cr-Al-Cu계 박막저항의 전기적 특성

  • 이붕주 (인하대학교 전기공학과 기능성박막연구실) ;
  • 차성익 (주식회사 아크로센스) ;
  • 김철수 (전자부품연구원(KETI)) ;
  • 한정인 (전자부품연구원(KETI)) ;
  • 김종택 (인하대학교 전기공학과 기능성박막연구실) ;
  • 이덕출 (인하대학교 전기공학과 기능성박막연구실)
  • Published : 2001.04.01

Abstract

In this work, we made the precision thin film resistors of NiCr alloy (74wt%Ni-f18wt%Cr-4wt%Al-4wt%Cu) using DC/RF magnetron sputtering method and studied the sheet resistance and TCR(Temperature Coefficient of Resistance) etc... of the Ni-Cr-Al-Cu alloy thin film according to the change by annealing treatment to 400$\^{C}$ in air and nitrogen atmosphere and the change(power, pressure, substrate temperature) of sputtering process.

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