Characterization and correction of bemding deformation in pizeoelectric ceramics displacement

길이변조용 압전소자의 휨 측정과 보정

  • 김재완 (한국표준과학연구원 레이저계측그룹) ;
  • 남승희 (한국표준과학연구원 레이저계측그룹) ;
  • 한재원 (한국표준과학연구원 레이저계측그룹)
  • Published : 2001.08.01


We suggest a method to measure and correct bending deformation in piezoelectric ceramics displacement. The angle and direction of the bending deformation are measured by monitoring the position of a laser beam reflected on a mirror which is attached to the piezoelectric ceramics with the uncertainty of the angle measurement of $0.36\mu$rad. We divided the electrode of a piezoelectric ceramic into 3 parts and connected 3 capacitors to each electrode in order to apply different voltage to each electrode with one voltage supplier. The deformation was corrected by adjusting the capacitance of each capacitor and was reduced to 6.3%, comparing to the uncorrected case. By using this corrected piezoelectric ceramic to modulate the length of the ringdown cavity, the fluctuation of the decay time caused by the change in optic axis of the cavity was removed.emoved.



  1. Meas. Sci. Technol. v.7 no.6 A laser measurement system for the high-precision calibration of displacement transducers U. Brand;K. Herrmann
  2. 한국과학기술원 박사학위논문 압전 세라믹을 이용한 음향 탐촉자 설계 및 제작에 관한 연구 박영현
  3. Annals of the CIRP v.46 no.1 Development of a traceable laser-base displacement calibration system with nanometer accuracy S.F.C.L. Wetzels;P.H.J. Schellekens
  4. 한국광학회지 v.10 no.3 연속발진 레이저를 이용한 광자감쇠 분광기의 오차요인 분석 김재완;이재용;한재원;유용심;공홍진;이해웅
  5. PZT reference manual Morgan Matroc Inc.
  6. Appl. Opt. v.38 no.9 Cavity ring-down spectroscopy with a continuous wave laser: calculation of coupling efficiency and a new spectrometer design Jae Won Hahn;Yong Shim Yoo;Jae Yong Lee;Jae Wan Kim;Hae-Woong Lee
  7. Chem. Phys. Lett. v.264 no.4 CW cavity ring down spectroscopy D. Romanini;A. A. Kachanov;N. Sadeghi;F. Stoeckel
  8. Cavity-ringdown spectroscopy: An ultratrace-absorption measurement technique K. W. Busch;M. A. Busch