A NUMERICAL ANALYSIS OF CZOCHRALSKI SINGLE CRYSTAL GROWTH OF SILICON WITH MISALIGNED CUSP MAGNETIC FIELDS

Misaligned된 비균일자장이 인가된 초크랄스키 실리콘 단결정성장에 대한 수치적 해석

  • Kim, Chang Nyung (College of Mechanical and Industrial System Engineering, Kyunghee University)
  • Published : 2000.06.30

Abstract

Melt flow, heat and mass transfer of oxygen have been analyzed numerically in the process of Czochralski single crystal growth of silicon under the influence of misaligned cusp magnetic fields. Since the silicon melt in a crucible for crystal growth is of high temperature and of highly electrical-conducting, experimentation method has difficulty in analyzing the behavior of the melt flow. A set of simultaneous nonlinear equations including Navier-Stokes and Maxwell equations has been used for the modelling of the melt flow which can be regarded as a liquid metal. Together with the melt flow which forms the Marangoni convection, a flow circulation is observed near the comer close both to the crucible wall and the free surface. The melt flow tends to follow the magnetic lines instead of traversing the lines. These flow characteristics helps the flow circulation exist. Mass transfer characteristics influenced by the melt flow has been analyzed and the oxygen absorption rate to the crystal has been calculated and turned out to be rather uniform than in the case of an aligned magnetic field.