The Improvement of Magnetic Properties of Co-Cr Thin Film for Perpendicular Magnetic Recording Media

수직자기기록매체용 Co-Cr 박막의 자기적 특성 개선에 관한 연구

  • 공석현 (경원대학교 공대 전기전자공학부) ;
  • 금민종 (경원대학교 공대 전기전자공학부) ;
  • 최형욱 (경원대학교 공대 전기전자공학부) ;
  • 최동진 (경원대학교 공대 전기전자공학부) ;
  • 김경환 (경원대학교 공대 전기전자공학부) ;
  • 손인환 (신성대학 전기과)
  • Published : 2000.04.01


We prepared Co-Cr thin film for perpendicular magnetic recording media with facing targets sputtering system(FTS system) which can deposit a high quality thin film in plasma-free state and wide range of working pressure. The effect of sputtering conditions(argon gas pressure and substrate temperature) on the magnetic and the crystallographic characteristic of Co-Cr thin film was investigated. And the variation of perpendicular coercivity with the variation of film thickness was studied. As a result we obtained the high perpendicular coercivity of 1900Oe and the good dispersion angle of c-axis($\Delta$$\theta$$_{50}$) of 5$^{\circ}$on the film thickness of 100nm for the promising recording layer of perpendicular magnetic recording media.c recording media.a.


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