Fabrication of the Electroluminescence Devices with Al electrode deposited by DC sputtering

DC 스퍼터링 증착에 의한 AI 전극을 갖는 전계발광소자 제작

  • 윤석범 (공주문화대학교 광전자통신과)
  • Published : 2000.04.01


We successfully fabricated OLED(Organic Light Emitting Diodes) with Al cathodes electrode deposited by the DC magnetron sputtering. The effects of a controlled Al cathode layer of an Indium Tin Oxide (ITO)/blended single polymer layer (PVK Bu:PBD:dye)/Al light emitting diodes are described. The PVK (Poly(N-vinylcarbazole)) and Bu-PBD (2-(4-biphenyl-phenyl)-1,3,4-oxadiazole) are used hole transport polymer and electron transport molecule respectively. We found that both current injection and electroluminescence output are significantly different with a variable DC sputtering power. The difference is believed to be due to the influence near the blended polymer layer/cathode interface that results from the DC power and H$\sub$2//O in a chamber. And DC sputtering deposition is an effective way to fabricate Al electrodes with pronounced orientational characteristics without damage occurring to metal-organic interface during the sputtering deposition.


  1. Appl. Phys. Lett. v.51 Organic electroluminescence diodes C.W. Tang;S.A. Vanslyke
  2. Appl. Phys. Lett. v.61 no.23 PPV Light Emitting diodes: Enhances electroluminescenct efficiency through charge carrier confinement A.R. Browon;D.D.C. Bradley;J.H. Burroughes;R.H. Friend;N.C. Greenham
  3. IEEE Circuit and Devices Magazine Conjugated polymers: Modern Electronic Materials Laura B. Smilowitz
  4. Advanced Material v.9 LEDs Based on PPV and polymide LB Films A. Wu;M.A. Kakimoto
  5. Appl. Phys. Lett. Dynamics of Photoexcited states and charge carriers in organic thin films: AIQ₃ Ardie D. Walser;Igor Sokolik;Richard Priestley;Roger Dorsinville
  6. AEU Int. J. Electron. Commun. v.50 Multilayer OLED for Flat Panel Displays D. Ammermann;A. Bohler;S. Dirr;H. Johannes;W. Kowalsky
  7. Science Stacked OLED in full color James R. Sheats
  8. Sceice v.267 Multilayer White LED Electroluminescenct device Junji Kido;Masato Kimura;Katsutoshi Nagai
  9. Appl. Phys. Lett. v.67 Single layer white light emitting organic electroluminescenct devices based on dye dispersed poly(N-vinylcarbazole) J. Kido;H. Shionoya;Nagai
  10. J. Appl. Phys. v.75 Carrier tunneling and device characteristics in polymer LED I.D. Parker
  11. J. Appl. Phys. v.79 Relationship between electroluminescence and current transport in organic heterojunction LED P.E. Burrows;Z. Shen;V. Bulovic;D.M. Mccarty;S.R. Forrest
  12. Appl. Phys. Lett. v.65 Schottky effect at a metal-polymer interface G.L.J.A. Rikken;D. Braun;E.G.J. Staring;R. Demandt
  13. J. Appl. Phys. v.73 Y. Gao;K.T. Park;B.R. Hsieh
  14. Appl. Phys. Lett. v.67 Symmetric LED from poly(p-diethynylene) (p-dipheny-lene vinylene) deriveatives S.A. Jeglinski;O. Amir;X. Wei;Z.V. Vardeny;J. Shinar;T. Cerkvenik;W. Chen;T.J. Barton
  15. Synth. Met. v.74 no.179 P. Bromas;J. Birgersson;N. Johansson;M. Logdlund;W.R. Salaneck
  16. J. Appl. Phys. v.79 A.C. Fou;O. Onitsuka;M. Ferreira;M.F. Rubner;B.R. Hsieh
  17. Appl. Phys. Lett. v.68 OLED with radio frequency sputter-deposited electron injecting electrodes H. Suzuki;M. Hikita
  18. Appl. Phys. Lett. v.70 Fabrication and electroluminescence of double layered OLED with the Al₂O₃AI cathode F. Li;H. Tang;J. Anderegg;J. Shinar
  19. Pure & Appl. Chem. v.67 Electroluminescence from single layer moleculary doped polymer films G.E. Johnson;K.M. Mcgrane;M. Stolka
  20. Appl. Phys. Lett. v.65 no.23 Reliability and degradation of organic light emitting devices P.E. Burrows;V. Bulovic;S.R. Forrest;L.S. Sapochak;D.M. McCarty;M.E. Thompson
  21. J. Appl. Phys. v.79 Efficient blue polymer LED from a series of soluble poly (paraphenylene)s Y. Yang;Q. Pei;A.J. Heeger
  22. J. Appl. Phys. v.76 Observation of degradation processes of Al electrodes in OLED by electroluminescence microscopy, atomic force microscopy, scanning electron microscopy, and Auger electron spectroscopy L.M. Do;E.M. Han;Y. Niidome;M. Fujihira