Tetramethyl orthosilicate(TMOS) Synthesis by the Copper-Catalyzed Reaction of the Metallic Silicon with Methanol (II) - The Kinetics of the Copper-Catalyzed Reaction of Silicon with Methanol -

구리 촉매하에서 규소와 메탄올의 반응에 의한 Tetramethyl orthosilicate(TMOS) 합성(제2보) - 구리촉매하에서 규소와 메탄올과의 반응의 반응속도론 -

  • Soh, Soon-Young (Hanwha Chemical Research and Engineering Center) ;
  • Won, Ho-Youn (Hanwha Chemical Research and Engineering Center) ;
  • Chun, Yong-Jin (Department of New Mat. & Appl. Chem., Chungwoon University) ;
  • Lee, Bum-Jae (Department of Fine Chemicals Engineering and Chemistry, Chungnam National University) ;
  • Yang, Hyun-Soo (Department of Fine Chemicals Engineering and Chemistry, Chungnam National University)
  • 소순영 (한화종합화학중앙연구소) ;
  • 원호연 (한화종합화학중앙연구소) ;
  • 전용진 (청운대학교 신소재응용화학과) ;
  • 이범재 (충남대학교 정밀공업화학과) ;
  • 양현수 (충남대학교 정밀공업화학과)
  • Received : 1998.09.12
  • Accepted : 1999.01.04
  • Published : 1999.04.10


The copper-catalyzed reaction of silicon with methanol was carried out in a mixed bed reactor to obtain tetramethyl orthosilicate (TMOS). In order to determine the kinetics of the reaction per active site on the silicon surface, a flow rate transition technique was employed. A kinetic study showed the reaction was in Linear relationship with the amount of contact mass and independent on the concentration of methanol. This result indicated that the rate-determining step was not the chemical process involving methanol, but the formation of silicon intermediate on the contact mass. On the basis of optimum experimental conditions, the maximum TMOS formation rate per g-silicon is 0.030 (g/min) at $210^{\circ}C$, in which activation energy was 8.5 kcal/mol and reaction rate equation was $k=4.09{\times}10^4\;exp$ ($-4.73{\times}10^3/T$).


Tetramethyl orthosilicate (TMOS);Kinetics;Direct Synthesis


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