Preparation and Characterization of Iron Phthalocyanine Thin Films by Vacuum Sublimation

진공증착법을 이용한 철프탈로시아닌 박막의 합성과 그 특성

  • Jee, Jong-Gi (Department of Chemistry, Kyungpool National University) ;
  • Lee, Jae-Gu (Department of Chemistry, Kyungpool National University) ;
  • Hwang, Dong-Uk (Department of Chemistry, Kyungpool National University) ;
  • Lim, Yoon-Mook (Department of Fine Chemistry Engineering & Chemistry, Chungnam National University) ;
  • Yang, Hyun-Soo (Department of Fine Chemistry Engineering & Chemistry, Chungnam National University) ;
  • Ryu, Haiil (Department of Chemistry Education, Kongju National University) ;
  • Park, Ha-Sun (National Institute of Scientific Investigation)
  • Received : 1998.05.11
  • Accepted : 1999.06.19
  • Published : 1999.08.10


In this experiment the Iron phthalocyanine (FePc) films on Si-wafer and alumina pallet were prepared using vacuum sublimation with conditions of changing reaction time, temperature, and deposition rate. Then, some samples were annealed following annealing. Techniques such as XRD, SEM, and resistance measurement method, were dedicated to characterize the changes of surface structure, phase transformation and electric resistance sensitivity in accordance with change of film thickness. In proportion to the decrease of deposition temperature from $370^{\circ}C$ to $350^{\circ}C$, intensities of (200), (011), (211) and (114) planes of $\alpha$-phase were decreased and (100) plane of $\beta$-phase were appeared. The film thickness were controlled by regulating the volume of precursor material during rapid deposition. As a result, it was observed that crystalline particle size had been increased according to the increase of film thickness and $\alpha$-phase transformed to $\beta$-phase. In consequence of measuring the crystallinity of films annealed between $150^{\circ}C$ and $350^{\circ}C$, $\alpha$- to $\beta$-phase transformation was appeared to begin at $150^{\circ}C$ and completely transformed to $\beta$-phase at $350^{\circ}C$. Electric resistance sensitivity of FePc film to $NO_x$ gas along temperature change of FePc films was observed to be more stable with the decrease of the film thickness.


Supported by : 한국과학재단


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