Applied Chemistry for Engineering (공업화학)
- Volume 10 Issue 5
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- Pages.644-651
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- 1999
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- 1225-0112(pISSN)
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- 2288-4505(eISSN)
Preparation and Characterization of Iron Phthalocyanine Thin Films by Vacuum Sublimation
진공증착법을 이용한 철프탈로시아닌 박막의 합성과 그 특성
- Jee, Jong-Gi (Department of Chemistry, Kyungpool National University) ;
- Lee, Jae-Gu (Department of Chemistry, Kyungpool National University) ;
- Hwang, Dong-Uk (Department of Chemistry, Kyungpool National University) ;
- Lim, Yoon-Mook (Department of Fine Chemistry Engineering & Chemistry, Chungnam National University) ;
- Yang, Hyun-Soo (Department of Fine Chemistry Engineering & Chemistry, Chungnam National University) ;
- Ryu, Haiil (Department of Chemistry Education, Kongju National University) ;
-
Park, Ha-Sun
(National Institute of Scientific Investigation)
- 지종기 (경북대학교 화학과) ;
- 이재구 (경북대학교 화학과) ;
- 황동욱 (경북대학교 화학과) ;
- 임윤묵 (충남대학교 정밀공업화학과) ;
- 양현수 (충남대학교 정밀공업화학과) ;
- 류해일 (공주대학교 화학교육과) ;
-
박하선
(국립과학수사연구소)
- Received : 1998.05.11
- Accepted : 1999.06.19
- Published : 1999.08.10
Abstract
In this experiment the Iron phthalocyanine (FePc) films on Si-wafer and alumina pallet were prepared using vacuum sublimation with conditions of changing reaction time, temperature, and deposition rate. Then, some samples were annealed following annealing. Techniques such as XRD, SEM, and resistance measurement method, were dedicated to characterize the changes of surface structure, phase transformation and electric resistance sensitivity in accordance with change of film thickness. In proportion to the decrease of deposition temperature from
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Acknowledgement
Supported by : 한국과학재단
References
- Adv. Inorg. Radiochem. v.7 A. B. P. Lever
- Cooedination Chemistry of Macrocyclic Compounds L. J. Boucher;G. A. Melson
- Coord. Chem. Rev. v.32 K. Kasuga;M. Tsutsui
- Adv. Inorg. Radiochem v.7 A. B. P. Lever
- J. Am. Chem. Soc. v.102 A. Giraudeau;F. F. Fan;A. J. Bard
- J. Phys. Chem. v.83 V. R. Shepard, Jr.;N. R. Armstrong
- J. Am. Chem. Soc. v.105 J. M. Greenand;L. R. Faulkner
- Appl. Phys. Lett. v.48 C. N. Tang
- J. Electrochem. Soc. v.134 G. Perrier;L. H. Dao
- Sensors W. Gopel;J. Hesse;J. N. Zemel
- Phthalocyanines Properties and Applications Tetsuo Saji
- Adv. Mater. v.11 M. Hanack;M. Lang
- J. Appl. Phys. v.3 T. A. Temofonte;K. F. Schoch
- Synth. Metals v.41-43 B. Speiser;A. Leverenz;M. Hanack
- J. Phys. Chem. v.69 Jacques M. Assour
- J. Phys. Chem. v.84 F. Iwatsu;T. Kobayashi;N. UYEDA
- Phys. Stat. Sol. ca v.139 S. I. Shihub;R. D. Gould
- Phys. Stat. Sol.(a) v.132 A. K. Hassan;R. D. Gould
- J. Phys. Chem. v.77 J. H. Sharp;M. Abkwitz
- Thin Solid Films v.82 P. S. Vimcett;Z. D. Ppovic;L. Mcintyre
- 박막프로세스의 기초 이형직;윤상옥;최두진
- Material and Interface Engineering M. J. O'Keefe;J. M. Rigsbef
- v.12 최동한
- Sensors and Acturators B v.4 A. W. J. Cranny;J. K. Atkinson;P. M. Barr;D. Mack
- 센서학회지(별책) v.3 C. D. Jan;H. D. Park;D. H. Cho;D. D. Lee