Studies on the Effects of Variables on the Fabrication Of C/SiC Composite by Chemical Vapor Infiltration in a Fluidized Bed Reactor

유동층반응기에서 화학증기침투에 의한 C/SiC의 복합체 제조시 변수의 영향 연구

  • Lee, Sung-Joo (Department of Chemical Engineering, Hongik University) ;
  • Kim, Yung-Jun (Department of Chemical Engineering, Hongik University) ;
  • Kim, Mi-Hyun (Department of Chemical Engineering, Hongik University) ;
  • Rim, Byung-O (Department of Chemical Engineering, Hongik University) ;
  • Chung, Gui-Yung (Department of Chemical Engineering, Hongik University)
  • 이성주 (홍익대학교 공과대학 화학공학과) ;
  • 김영준 (홍익대학교 공과대학 화학공학과) ;
  • 김미현 (홍익대학교 공과대학 화학공학과) ;
  • 임병오 (홍익대학교 공과대학 화학공학과) ;
  • 정귀영 (홍익대학교 공과대학 화학공학과)
  • Received : 1999.01.04
  • Accepted : 1999.08.13
  • Published : 1999.10.10


In this research, C/SiC composites, i.e. activated carbon coated with SiC obtained from dichlorodimethylsilane(DDS) and hydrogen, have been made by chemical vapor infiltration(CVI) in a fluidized bed reactor. Activated carbons of sizes of 4~12, 12~20, and 20~40 mesh were used. After deposition the surface area, the amount and the shape of deposit of each sample were observed at different concentrations of reactant DDS, sizes of activated carbon, reaction pressures and reaction times. The experimental results showed that uniform deposition in the pores of sample was obtained at a lower concentration of DDS and a lower pressure. Additionally, from the observation that the pore diameter and the surface area have minimum values at a certain time of deposition, it was known that deposition occurred inside of the pore at first and then on the outside of particle. Small particles of SiC were deposited uniformly on the surface of activated carbon at lower DDS concentrations and lower reaction pressures. The results were confirmed by SEM, TGA, the pore size distribution analyzer and BET.


fluidized bed;CVI;ceramic composite;silicon carbide;activated carbon


Supported by : 한국과학재단


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