외부가압 공기 베어링 지지 스핀들 시스템에서 직각도 오차가 운전 정밀도에 미치는 영향

An Effect on the Running Accuracy of the Perpendicularity Error in the Spindle System Supported with Externally-Pressurized Air Bearing

  • 고정석 (한국과학기술원 기계공학과) ;
  • 김경웅 (한국과학기술원 기계공학과)
  • 발행 : 1999.09.01


Recently as electronics and semi-conductor industry develop, ultra-precision machine tools that use air-spindle with externally pressurized air bearing appear in need of ultra-precision products which demand high precision property. Effects of air compressibility absorbs the vibration of shaft, this is called averaging effect, however, the higher running accuracy is demanded by degrees, the more important factor is machining errors that affect running accuracy of shaft. Actually, it would be very important in the view points of running accuracy to understand effects of machining errors on the running accuracy of the spindle system quantitatively to design and manufacture precision spindle system in the aspect that efficiency in manufacturing spindle system and performance in operation. So fu, there are some researches on the effects that machining error affect running accuracy. However, because these researches deal with one bearing of spindle system, these results aren't enough to explain how much machining errors affect running accuracy in the typical spindle system overall. In this study, we investigate the effects of the perpendicularity error of bearing and shaft on running accuracy of spindle system that consists of journal and thrust bearing theoretically, and suggest design guideline about shape tolerances.



  1. JSME International, Series Ⅲ v.31 no.1 A Study on Running Accuracy of an Externally Pressurized Gas Thrust Bearing (Load Capacity Fluctuation Due to Machining Errors of the Bearing) Yabe, H.;Yamanoto, M.
  2. JSME International, Series Ⅲ v.32 no.4 A Study on the Running Accuracy of an Externally Pressurized Gas Thrust Bearing (Bearing Stiffness and Damping Coefficient) Yabe, H.;Yamanoto, M.
  3. JSME International, Series Ⅲ v.34 no.3 A Study on the Running Accuracy of an Externally Pressurized Gas Thrust Bearing (Rotor Run-Out Characteristics) Yabe, H.;Yamanoto, M.
  4. 超精密加工技術 砥粒加工硏究會態谷記念會
  5. Annals of the CIRP v.25 no.2 Axes of Rotation Unification Document Me
  6. 日本機械學會誌 v.83 no.742 工作機械主軸の 回轉精度 壇野義昭
  7. ANSI/ASME B89.3.4M Axes of Rotation : Methods for Specifying and Testing An American National Standard