A Study on the measurement of Electron Energy Distribution Function in Ar plasma measured by the waveforms of Langmuir probe voltages

Langmuir 프로브 전압의 파형에 따른 아르곤 플라즈마의 전자에너지 분포함수 측정에 관한 연구

  • Published : 1999.05.01

Abstract

In this paper, we have obtained the Electron Energy Distribution Function(EEDF) in plasma by using two differentiators and investigated the EEDFs by sawtooth and triangle waveform voltages with the working pressures and the positions of single probe. It is found that as the working pressure is decreased, the EEDFs approach to theMaxwellian distribution independent of the waveforms of probe voltage. On the otherhand, as the position of probe is moved from the center of the plasma to its edge, the EEDF of sawtooth waveform probe voltage approaches to the Maxwellian distribution, but the EEDF of triangle waveform probe voltage deviates from the Maxwellian distribution.

Keywords

Electron Energy Distribution Function(EEDF);Langmuir probe;Sawtooth and triangle waveform probe voltages.

References

  1. Jpn. J. Appl. Phys. v.28 no.5 Electric Probe Measurement in an ECR Plasma CVD Apparatus K. Shirai(et al)
  2. Physica Scripta. v.53 On the Electron Vibrational Temperature in a Nitrogen Afterglow Plasma A. A. Kudryavtsev;A. I. Ledyankin
  3. Meas. Sci. Technol. v.7 A new simple method for suppression of influence of rf plasma oscillations during Langmuir probe measurements P. Spatenka;V. Brunnhofer
  4. 일본전기학회 기술보고(Ⅱ부) no.152
  5. Thin Film Deposition D. L. Smith
  6. J. Appl. Phys. v.73 no.4 Optical Ion Energy Measurements in a Radio-Frequency-Induction Plasma Source J. A. O' Neill(et al)
  7. Appl. Phys. Lett. v.62 no.21 Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge M. S. Barnes(et al)
  8. AVS Monograph series D. N. Ruzic;W. Weed(Ed.)
  9. Microwave Discharges C. M. Ferreir
  10. Thin Film Processes Ⅱ J. L. Vossen;W. Kern(Eds.)
  11. J. Phys. D: Appl. Phys. v.28 A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves E. Tatarova;D. Zamfirov
  12. C. V. D. 핸드북(제4장) 이시우(역)
  13. Rev. Sci. Instrum v.66 no.9 A new smoothing method for obtaing the electron energy distribution function in plasmas by the numerical differentiation of the I-V probe characteristic J. I. Fernandez Palop(et al)
  14. J. Appl. Phys. v.43 no.11 Measurement of electron distribution function in a cesium plasma C. H. Chen(et al)