A Study on the Sputtering-resistant Properties of MgO Thin-film in the AC Plasma Display Panel (PDP)

AC Plasma Display Panel (PDP)에서 MgO 박막의 내스퍼터성에 관한 연구

  • 지성원 (부산대 공대 전기과학과) ;
  • 여재영 (부산대 공대 전기과학과) ;
  • 이우근 (부산대 공대 전기공학과) ;
  • 조정수 (부산대 공대 전기공학과) ;
  • 박정후 (부산대 공대 전기공학과)
  • Published : 1999.05.01


The life of AC PDP depends largely on the sputtering-resistant property of the protecting layer such as MgO thin-film. However, it is very difficult to measure the sputtering-resistant property in the stable driving conditions of AC PDP. In this paper we have suggested a high speed measurement technique of the sputtering-resistant property of MgO thin-film by applying the MgO thin-film as the target of RF magnetron sputtering system. We have also applied this method to the e-beam MgO and sputter-MgO and e-beam MgO superior to sputter-MgO 3 times over. Also, the relation of Xe gas partial pressure(X) and sputtered thickness(Y) was Y=3.4X+13.5.


AC PDP;PDP protecting layer;RF discharge;sputtering-resistant property


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