The Variation of the Characteristics of DLC Thin films by Pulsed Laser Deposition

레이저 증착변수에 의한 다이아몬드상 카본 박막 특성변화

  • 심경석 (연세대 공대 전기공학과) ;
  • 이상렬 (연세대 공대 전기공학과)
  • Published : 1999.05.01


Diamond like carbon(DLC) thin films possesed not only marvelous material characteristics such as large thermal conductivity, high hardness and being chemically inert, but also possesed negative electron affinity (NEA) properties. The NEA is an extremely desirable property of the material used in microelestronics and vacuum microelestronics device. DLC films were fabricated by pulsed laser deposition(PLD). Theeffect of the laser energy density and the substrate temperature on the properies of DLC films was investigated. The experiment was accomplished at temperatures in the range of room temperature to $600^{\circ}C$. The laser energy density was in the range of 6 $J/cm^2$ to 16 $J/cm^2$.


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