Annealing Effect on the Characteristics of Thin Film Inductors with Inner Coil Type

내부 코일형 박막 인덕터의 특성에 미치는 열처리 효과

  • 민복기 (한국전기연구소 전기재료연구부) ;
  • 김현식 (한국전기연구소 전기재료연구부 위촉연구원) ;
  • 송재성 (한국전기연구소 전기재료연구부)
  • Published : 1999.05.01


Thin film inductors of $10 mm \times 10 mm$ with inner coil type of 14 turns were fabricated by sputtering, photo-masking, and etching processes. Their characteristics of impedances and annealing after were investigated. The properties of impedances of the thin film magnetic core inductors with inner coil type were improved by magnetic field annealing due to the removal of residual stress and the improvement magnetic properties of magnetic films. But the characteristics of frequency of the thin film magnetic core inductors were not improved by magnetic field annealing due to properties of the spiral pattern and inner coil type. The thin film magnetic core inductor annealed by uniaxal field annealing method showed an inductance of 1000 nH and resistance of$ 6 \Omega$ of 1 at 2 MHz.


Thin Film Inductor;Inner Coil Type;Field Annealing;Magnetic Anisotropy;Impedance


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