Synthesis of BaTiO3 Thin Film on Ti Electrode by the Current Pulse Waveform

펄스전류파형을 이용한 Ti 전극위에서 BaTiO3박막의 합성

  • Kang, Jinwook (Department of Chemical Engineering, Inha University) ;
  • Tak, Yongsug (Department of Chemical Engineering, Inha University)
  • Received : 1998.05.25
  • Accepted : 1998.09.11
  • Published : 1998.12.10


$BaTiO_3$ thin film was electrochemically deposited on Ti electrode in a 0.4 M $Ba(OH)_2$ solution of $85^{\circ}C$ using a current pulse waveform. Both $BaTiO_3$ crystallinity and faradaic efficiency for the film formation were enhanced with the increase of cathodic current density and pulse time. Based on the surface analysis and electrochemical studies, it was suggested that, during cathodic pulsed, the surface pH increase due to the reduction of $H_2O$ accelerates the structural changes of Ti oxides which were formed during anodic cycle. Prior to experiments, Ti oxides were intentionally grown in 0.1 M $H_2SO_4$ solution and the effect of initial oxide film thickness on the $BaTiO_3$ film formation was investigated. The migration of $Ti^{+4}$ ions through the oxide film was retarded with the increase of film thickness and it was observed that the crystallization of $BaTiO_3$ was only limited to the defect area of surface oxides.


Supported by : 교육부


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