Synthesis of Diamond Thin Films by Rf Plasma Assisted Chemical Vapor Deposition

RF 플라즈마 CVD법에 의한 다이아몬드 박막의 합성

  • 이상희 (인하대학교 공대 전기공학과) ;
  • 이덕출 (인하대학교 공대 전기공학과)
  • Published : 1998.07.01

Abstract

Diamond thin films were deposited on Si substrate using $CH_4 and H_2$mixed gas by RF plasma CVD. Prior to deposition, the substrate surface was mechanically scratched with the diamond paste of $3{\mu}m$ to improve the density of nucleation sites. The microstructure of diamond films deposited with methane(0.5%~2%) at the reaction pressure ranging from 20 torr to 50torrr were studied by a scanning electron microscope. It was observed in the deposited diamond films that the nucleation density decreased and crystallinity increased with decreasing the methane concentration. However, the nucleation density and crystallinity were decreased with decreasing the process pressure.

References

  1. J. Crystal Growth no.2 Filamentary Diamond Crystals Derjaguin, B. V.;Fedoseev, D. V.;Lukyanovich, V. M.;Spitzin, B. V.;Ryabov, V. A.;Lavrentyen, A. V.
  2. Patent 3030187, 3030188 Eversole, W. G.
  3. J. Appl. Phys. v.39 no.9 Growth of Diamond Seed Crystals by Vapor Deposition J.C. Angus;H.A. Will;W.S. Stanko
  4. CVD ハンドブック 化學工學會
  5. Jpn. J. Appl .Phys. v.21 no.4 Vapor Deposition of Diamond Particles From Methane Matsumoto, S.;Sato, Y.;Kamo, M.;Setaka, N.
  6. Appl. Phys. Lett. v.63 no.18 Diamond growth using remote methan injection in a direct current arcjet chemical vapor deposition reactor Reeve, S. W.;Weiner, W. A.;Dandy, D. S.
  7. J. Appl. Phys. v.69 no.9 Observation of surface modification and nucleation during deposition of diamond on silicon by scanning tunneling microscopy Turner, K. F.;Stoner, B. R.;Bergman, L.;Glass, J. T.;Nemanich, R. J.
  8. J. Mater. Sci. Lett. no.4 Chemical vapour deposition of diamond in RF glow discharge Matsumoto, S.
  9. J. Vac. Sci. Tech. v.A 4 no.3 Thin film growth rate effects for primary ion beam deposited diamondlike carbon films Nir, D.;Mirtich, M.
  10. J. Appl. Phys. v.58 no.1 Four-fold to three-fold transition in diamond-like amorphous carbon films : A study of optical and electrical properties Savvides, N.
  11. J. Mater. Sci. no.28 Effect of reaction on the nucleation behavior of diamond synthesized by hot-filament chemical vapour deposition Kim, D. G.;Lee, H. C.;Lee, J. Y.