Fabrication of Mo-tip Field Emitter Array and Diamond-like Carbon Coating Effects

몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅효과

  • 주병권 (KIST 정보재료소자연구센터) ;
  • 정재훈 (KIST 정보재료소자연구센터) ;
  • 김훈 (KIST 정보재료소자연구센터) ;
  • 이상조 (KIST 정보재료소자연구센터) ;
  • 이윤희 (KIST 정보재료소자연구센터) ;
  • 차균현 (고려대학교 전자공학과) ;
  • 오명환 (KIST 정보재료소자연구센터)
  • Published : 1998.07.01


Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.


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