A Study on the Improvement of the Electron Transport Properties in $SF_{6+}Ar$ Mixtures Gas

$SF_{6+}Ar$혼합기체의 전자수송특성 개선에 관한 연구

  • Published : 1998.01.01


In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.


  1. Advances in high voltage insulation and arc interruption in $SF_6$ and vacuum V.N.Maller;M.S.Naidu
  2. J. Phys. D: Appl. Phys. v.21 Electron swarm development in $SF_6$ : I. Boltzmann equation analysis H. Itoh;Y. Miura;N. Ikuta;Y. Nakao;H. Taga shira
  3. 半導體 プラズム プロセス技術 菅野卓雄
  4. J. Phys. B. v.2 Monte Carlo simulation of electrical discharge in gases R.W.L. Thomas;W.R.L. Thomas
  5. モンテカルロ法と シミユレ-シヨン 培風館
  6. J. Phys. B: At. Mol. Phys. v.17 The scattering of low-energy electrons by argon atoms K.L.Bell;N.S.Scott;M.A.Lennon
  7. J. Phys. 21 Electron transport parameters in argon and its momentum transfer cross section Y.Nakamura;M.Kurachi
  8. 한국전기전자재료학회지 v.8 no.6 몬테 칼로법을 이용한 Ar기체의 전자수송계수에 관한 연구 하성철;전병훈;백승권
  9. J. chem. phys. v.43 Rapp D;Englander-Golend
  10. Phys. Rev. A. v.32 no.6 Scattering of electrons from argon atoms Arati Dasqupta;A.K.Bhatia
  11. 한국전기전자재료학회지 v.9 no.7 $SF_6$가스의 전자수송특성에 관한 몬테칼로 시뮬레이션 하성철;서상현
  12. J. Appl. Phys. v.64 Electron-transport, ionization, attachment and dissociation, coefficients in $SF_6$ and its mixtures A.V. Phelps;R.J. Van Brunt
  13. A Satellite of ICPEAC XVⅡ, Proc Joint symposium on electron and ion swarm and low energy electron scattering M. Hayashi;S. Hara