# $SF_{6+}Ar$혼합기체의 전자수송특성 개선에 관한 연구

• Published : 1998.01.01

#### Abstract

In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

#### References

1. Advances in high voltage insulation and arc interruption in $SF_6$ and vacuum V.N.Maller;M.S.Naidu
2. J. Phys. D: Appl. Phys. v.21 Electron swarm development in $SF_6$ : I. Boltzmann equation analysis H. Itoh;Y. Miura;N. Ikuta;Y. Nakao;H. Taga shira
3. 半導體 プラズム プロセス技術 菅野卓雄
4. J. Phys. B. v.2 Monte Carlo simulation of electrical discharge in gases R.W.L. Thomas;W.R.L. Thomas
5. モンテカルロ法と シミユレ-シヨン 培風館
6. J. Phys. B: At. Mol. Phys. v.17 The scattering of low-energy electrons by argon atoms K.L.Bell;N.S.Scott;M.A.Lennon
7. J. Phys. 21 Electron transport parameters in argon and its momentum transfer cross section Y.Nakamura;M.Kurachi
8. 한국전기전자재료학회지 v.8 no.6 몬테 칼로법을 이용한 Ar기체의 전자수송계수에 관한 연구 하성철;전병훈;백승권
9. J. chem. phys. v.43 Rapp D;Englander-Golend
10. Phys. Rev. A. v.32 no.6 Scattering of electrons from argon atoms Arati Dasqupta;A.K.Bhatia
11. 한국전기전자재료학회지 v.9 no.7 $SF_6$가스의 전자수송특성에 관한 몬테칼로 시뮬레이션 하성철;서상현
12. J. Appl. Phys. v.64 Electron-transport, ionization, attachment and dissociation, coefficients in $SF_6$ and its mixtures A.V. Phelps;R.J. Van Brunt
13. A Satellite of ICPEAC XVⅡ, Proc Joint symposium on electron and ion swarm and low energy electron scattering M. Hayashi;S. Hara