Analysis of multi-layered Surface with Glow Discharge-Mass Spectrometry

글로우방전 질량분석법을 이용한 다층박막의 표면 분석

  • Pak, Yong-Nam (Department of Chemistry, Korea National University of Education) ;
  • Lee, Gae-Ho (Department of Chemistry, Chungnam National University) ;
  • Kim, Hyo Jin (Department of Pharmacy, Dong Duck Women's University)
  • 박용남 (한국교원대학교 화학교육학과) ;
  • 이계호 (충남대학교 화학과) ;
  • 김효진 (동덕여자대학교 약학과)
  • Received : 1997.05.19
  • Published : 1997.10.25

Abstract

A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few ${\mu}m$ thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.

Keywords

glow discharge;glow discharge mass spectrometry;depth profile study;multi-layer profile study

Acknowledgement

Supported by : 과학재단