Changes of Camber on Lamination Conditions in alumina/Tungsten Cofiring Multilayer Package

알루미나/텅스텐 동시소성에 의한 다층 팩키지 제조시 적층조건에 따른 camber의 변화

  • 성재석 (전자부품종합기술연구소) ;
  • 구기덕 (전자부품종합기술연구소) ;
  • 윤종광 ((주) 글로텍) ;
  • 이상진 (일리노이 주립대학 재료공학과) ;
  • 박정현 (연세대학교 세라믹공학과)
  • Published : 1997.06.01

Abstract

In cofiring of multilayered alumina with tungsten, the change of camber with lamination condition was experimented and the effect of sintering shrinkage of alumina and tungsten was investigated. From the exact measurement of sintering shrinkage of tungsten thick film, as lamination pressure increased, the sintering shrinkage of alumina decreased but that of tungsten thick film was not changed. So it was though that the main factor which induced the sintering shrinkage difference between ceramics and metal with lamination condition was the change of sintering shrinkage of ceramics. In case of high lamination pressure, high green sheet density, the cofired specimen showed low camber due to low shrinkage difference between alumina and tungsten and there was a linear relation between camber and shrinkage difference. It was found that this shrinkage difference could change the thickness of tungsten film and the microstructure within via hole during cofiring.

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