Abstract

본 연구에서는 자동화된 VLSI 제조 시스템 환경에서의 로트 조정기 및 범용 셀 제어기의 구축에 필요한 새로운 소프트웨어 구조 및 프로토콜을 제시하였다. 반도체 제조 시스템의 운용 제어 활동은 로트 조정기와 범용 셀 제어기가 상호 협조적으로 통신하는 클라이언트/서버 구조로 모형화 되었으며, 로트 조정기는 하나 이상의 작업을 수행할 수 있는 범용 셀 제어기에 작업을 의뢰하는 클라이언트로서 작동된다. 반도체 제조 시스템의 운용 소프트웨어와 관련된 기존의 연구들이 개념적인 구조와 전략 만을 다루었던 것과는 달리, 본 연구에서는 생산 설비 뿐만 아니라 물류운반 장치의 제어를 위하여 상세한 수준에서의 설계가 제시되었다. 본 연구의 특징으로는 설비 구성, 로트 형태, 일정 계획 규칙 등의 변경에 대한 동적 재구성 가능성을 들 수 있다. 또한 제안된 설계는 상용화된 프로세스 통신 기능을 사용하여 구현이 용이하다.

Keywords

• VLSI manufacturing;
• cell controller;
• manufacturing system operation

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