Optimization of 'Patterned Ground Shield' of Spiral Inductor using Taguchi's Method

다구찌 실험 계획법을 이용한 나선형 인덕터의 패턴드 그라운드 쉴드 최적 설계 연구

  • 고재형 (중앙대학교 전자전기공학부) ;
  • 오상배 (중앙대학교 전자전기공학부) ;
  • 김동훈 (경북대학교 전자전기컴퓨터학부) ;
  • 김형석 (중앙대학교 전자전기공학부)
  • Published : 2007.08.24


This paper describes the optimization of PGS(Patterned Ground Shield) of 5.5 turns rectangular spiral inductor using Taguchi's method. PGS is decrease method of parasite component by silicon substrate among dielectric loss reduction method. By using the taguchi's method, each parameter is fixed upon that PGS high poison(A), slot spacing(B), strip width(C) and overlap turn number(D) of PGS design parameter. Then we verified that percentage contribution and design sensitivity analysis of each parameter and level by signal to noise ratio of larger-the-better type. We consider percentage contribution and design sensitivity of each parameter and level, and then verify that model of optimization for PGS is lower inductance decreasing ratio and higher Q-factor increasing ratio by EM simulation.