Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
An ultrasonic linear motor using lambda shape vibrators has been designed and fabricated. The multiway ultrasonic motors mainly consist of an lambda shape ultrasonic vibrator which generates elliptical motions in beat. The lambda shape ultrasonic linear motor use longitudinal and bending vibration mode. In order to high precision motion control and multiway moving, piezoceramics were adhered to lambda shape brass elastic material. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. As a result of estimating the characteristics of the ultrasonic linear motor, The results have shown that the lambda shape ultrasonic linear motor can be moved multiwav by using the phase control. Close agreement between the FEM results and experimental results obtained for the lambda shape ultrasonic linear motor.