Characteristics of Amorphous Fe-based Thin Firms with Low Core Losses

저손실 Fe-계 비정질 박막의 자기적 특성

  • 민복기 (한국전기연구소 신소재응용연구그룹) ;
  • 김현식 (한국전기연구소 신소재응용연구그룹) ;
  • 송재성 (한국전기연구소 신소재응용연구그룹) ;
  • 허정섭 (경남대학교 공과대학 신소재공학부) ;
  • 오영우 (한국전기연구소 신소재응용연구그룹)
  • Published : 1999.11.01


In this study, we have fabricated amorphous FeZrBAg thin films with low core losses by using DC magnetron sputtering method. After deposition, rotational field annealing (RFA) method was performed in the dc field of 1.5 kOe. The amorphous FeZrBAg thin films produced by annealing at 35$0^{\circ}C$ was founded to have high permeability of 8680 at 100 MHz, 0.2 mOe, low coercivity of 0.86 Oe high magnetization of 1.5 T and very low core loss of 1.3 W/cc at 1 MHz, 0.IT respectively. Excellent soft magnetic properties in a amorphous FeZrBAg thin films in the present study are presumably the homogeneous formation of very fine bcc $\alpha$-Fe crystalline with the 8.2 nm in an amorphous FeZrBAg thin film matrix.