Study on the synthesis and the frequency response of HTS microwave device fabricated by pulsed laser deposition

레이저 공정을 이용한 초전도 통신소자 제작과 고주파특성 연구

  • Park, Joo-Hyung (Department of Electrical Engineering, Yonsei University) ;
  • Jeong, Young-Sik (Department of Electrical Engineering, Yonsei University) ;
  • Lee, Sang-Yeol (Department of Electrical Engineering, Yonsei University)
  • 박주형 (연세대학교 전기공학과) ;
  • 정영식 (연세대학교 전기공학과) ;
  • 이상렬 (연세대학교 전기공학과)
  • Published : 1997.11.29


Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.